Reducing the macroparticle content of cathodic arc evaporated TiN coatings

Harris, S. G., Doyle, E. D., Wong, Y.-C., Munroe, P. R., Cairney, J. M. and Long, John 2004, Reducing the macroparticle content of cathodic arc evaporated TiN coatings, Surface and coatings technology, vol. 183, no. 2-3, pp. 283-294, doi: 10.1016/j.surfcoat.2003.08.086.

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Title Reducing the macroparticle content of cathodic arc evaporated TiN coatings
Author(s) Harris, S. G.
Doyle, E. D.
Wong, Y.-C.
Munroe, P. R.
Cairney, J. M.
Long, JohnORCID iD for Long, John
Journal name Surface and coatings technology
Volume number 183
Issue number 2-3
Start page 283
End page 294
Publisher Elsevier Science BV
Place of publication Amsterdam, Netherlands
Publication date 2004-05-24
ISSN 0257-8972
Keyword(s) PVD
Cathodic arc evaporation
titanium nitride
Summary Cathodic arc evaporation (CAE) is a widely used technique for generating highly ionised plasma from which hard, wear-resistant PVD coatings can be deposited. A major drawback of this technique is the emission of micrometer-sized droplets of cathode material from the arc spot, which are commonly referred to as ‘macroparticles’. In this study, the effect of cathode poisoning was investigated as a method to reduce the number of macroparticles in PVD coatings. While the study focuses on the reduction of macroparticles in titanium nitride coatings, the outcomes and key findings can be broadly applied to the cathodic arc process, in particular, for the reduction of macroparticles in more advanced CAE coatings. The results support earlier findings that have shown that poisoning of the cathode can reduce the number of macroparticles emitted from the arc spot. The results of glow discharge optical emission spectroscopy (GD-OES) showed that the titanium content of the coatings varied little between the respective coatings despite changes in the deposition pressure from 0.1 to 1.2 Pa. The GD-OES results also showed the presence of oxide contamination at the surface of the coatings, which was significantly reduced with increasing deposition pressure. The coatings were also deposited onto high-speed steel twist drills to compare the metal-cutting performance when dry drilling a workpiece of cast iron. The results of the drill tests showed that tool life increased with a reduction in the number of macroparticles.
Language eng
DOI 10.1016/j.surfcoat.2003.08.086
Field of Research 091499 Resources Engineering and Extractive Metallurgy not elsewhere classified
HERDC Research category C1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2003, Elsevier B.V.
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