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Patterned growth of carbon nanotubes on Si substrates without predeposition of metal catalysts

Chen, Ying and Yu, Jun 2005, Patterned growth of carbon nanotubes on Si substrates without predeposition of metal catalysts, Applied physics letters, vol. 87, no. 3, pp. 1-3.

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Title Patterned growth of carbon nanotubes on Si substrates without predeposition of metal catalysts
Author(s) Chen, Ying
Yu, Jun
Journal name Applied physics letters
Volume number 87
Issue number 3
Start page 1
End page 3
Total pages 3
Publisher American Institute of Physics
Place of publication New York, N.Y.
Publication date 2005
ISSN 0003-6951
1077-3118
Keyword(s) carbon nanotubes
capillarity
catalysts
chemical vapor deposition
nucleation
scanning electron microscopy
silicon
substrates
X ray spectroscopy
Summary Aligned carbon nanotubes (CNTs) can be readily synthesized on quartz or silicon-oxide-coated Si substrates using a chemical vapor deposition method, but it is difficult to grow them on pure Si substrates without predeposition of metal catalysts. We report that aligned CNTs were grown by pyrolysis of iron phthalocyanine at 1000 °C on the templates created on Si substrates with simple mechanical scratching. Scanning electron microscopy and x-ray energy spectroscopy analysis revealed that the trenches and patterns created on the surface of Si substrates were preferred nucleation sites for nanotube growth due to a high surface energy, metastable surface structure, and possible capillarity effect. A two-step pyrolysis process maintained Fe as an active catalyst.
Notes This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Chen, Ying and Yu, Jun 2007, Patterned growth of carbon nanotubes on Si substrates without predeposition of metal catalysts, Applied physics letters, vol. 87, no. 3, pp. 033103-1-033103-3, and may be found at http://dx.doi.org/10.1063/1.1995961.
Language eng
Field of Research 100707 Nanomanufacturing
Socio Economic Objective 970110 Expanding Knowledge in Technology
HERDC Research category C1.1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2005, American Institute of Physics
Persistent URL http://hdl.handle.net/10536/DRO/DU:30016451

Document type: Journal Article
Collections: Institute for Technology Research and Innovation
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Every reasonable effort has been made to ensure that permission has been obtained for items included in DRO. If you believe that your rights have been infringed by this repository, please contact drosupport@deakin.edu.au.