Scratching carbon nanotubes onto Si substrates

Yu, Jun and Chen, Ying 2006, Scratching carbon nanotubes onto Si substrates, in MSR 2006 : Symposium U, Organic and inorganic nanotubes -- from molecular to submicron structures MRS proceedings : Volume 922E, Materials Research Society, New York, N.Y., pp. 0922-u07-15-.


Title Scratching carbon nanotubes onto Si substrates
Author(s) Yu, Jun
Chen, Ying
Conference name Materials Research Society. Symposium (2006 : Boston, Massachusetts)
Conference location Boston, Massachusetts
Conference dates 17-21 Apr. 2006
Title of proceedings MSR 2006 : Symposium U, Organic and inorganic nanotubes -- from molecular to submicron structures MRS proceedings : Volume 922E
Editor(s) Nielsch, K.
Hayden, O.
Ihara, H.
Wang, D.
Publication date 2006
Start page 0922-u07-15
Publisher Materials Research Society
Place of publication New York, N.Y.
Summary Large-scale, high-density, and patterned carbon nanotubes (CNTs) on both pure Si and quartz (SiO2) substrates have been produced using different approaches. The CNTs were synthesized by pyrolysis of the ball-milled iron phthalocyanine (FePc) in a tube furnace under a Ar-5% H2 gas flow. Because patterned CNTs are difficult to grow directly on smooth and perfect single-crystalline Si wafer surface, mechanical scratches were created to help the selective deposition and growth of CNTs on the scratched areas. This simple process does not require pre-deposition of any metal catalysts. For SiO2 substrates, which can be readily covered by a CNT film, patterned CNTs are produced using a TEM grid as mask to cover the areas where CNTs are not needed. The growth temperature and vapor density have strong influence on the patterned CNT formation. The scratch areas with a special structure and a higher surface energy help the selective nucleation of CNTs.
Language eng
Field of Research 100707 Nanomanufacturing
Socio Economic Objective 970110 Expanding Knowledge in Technology
HERDC Research category E3.1 Extract of paper
Copyright notice ©2006, Materials Research Society
Persistent URL http://hdl.handle.net/10536/DRO/DU:30016486

Document type: Conference Paper
Collection: Institute for Technology Research and Innovation
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