Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application

Ji, H., Hsu, H. Y., Chua, J., Kong, L. X., Wedding, A. B., She, M., Lin, G. C. I. and Fan, K. C. 2005, Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application, in SPIE 2005 : Proceedings of the 2005 Society of Photo-optical Instrumentation Engineers, International symposium on Microelectronics, MEMS and Nanotechnology, SPIE, [Brisbane, Qld.].


Title Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application
Author(s) Ji, H.
Hsu, H. Y.
Chua, J.
Kong, L. X.
Wedding, A. B.
She, M.
Lin, G. C. I.
Fan, K. C.
Conference name Society of Photo-optical Instrumentation Engineers (2005 : Brisbane, Queensland)
Conference location Brisbane, Queensland
Conference dates 11-15 December 2005
Title of proceedings SPIE 2005 : Proceedings of the 2005 Society of Photo-optical Instrumentation Engineers, International symposium on Microelectronics, MEMS and Nanotechnology
Editor(s) Hariz, A.
Publication date 2005
Conference series Society of Photo-optical Instrumentation Engineers Conference
Publisher SPIE
Place of publication [Brisbane, Qld.]
Language eng
Field of Research 090606 Photonics and Electro-Optical Engineering (excl Communications)
HERDC Research category E1.1 Full written paper - refereed
Persistent URL http://hdl.handle.net/10536/DRO/DU:30026025

Document type: Conference Paper
Collection: Centre for Material and Fibre Innovation
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