Concept design of a novel tactile probe tip for down scaled 3D CMMs

Ji, H., Kong, L. X., Hsu, H. Y., Wedding, A. B., Lin, G. C. I. and Fan, K. C. 2005, Concept design of a novel tactile probe tip for down scaled 3D CMMs, in SPIE 2005 : Proceedings of the 2005 Society of Photo-optical Instrumentation Engineers, International symposium on Microelectronics, MEMS and Nanotechnology, SPIE, [Brisbane, Qld.].


Title Concept design of a novel tactile probe tip for down scaled 3D CMMs
Author(s) Ji, H.
Kong, L. X.
Hsu, H. Y.
Wedding, A. B.
Lin, G. C. I.
Fan, K. C.
Conference name Society of Photo-optical Instrumentation Engineers (2005 : Brisbane, Queensland)
Conference location Brisbane, Queensland
Conference dates 11-15 December 2005
Title of proceedings SPIE 2005 : Proceedings of the 2005 Society of Photo-optical Instrumentation Engineers, International symposium on Microelectronics, MEMS and Nanotechnology
Editor(s) Chiao, J. C.
Dzurak, A.
Jagadish, C.
Thiel, D.
Publication date 2005
Conference series Society of Photo-optical Instrumentation Engineers Conference
Publisher SPIE
Place of publication [Brisbane, Qld.]
Summary Although coordinate metrology has reached a very high state of development concerning versatility and accuracy for common engineering parts, a high precision capability with nano scale resolution and accuracy is often hard to achieve when it is required to measure very small parts and features. The limiting component is the bulky probing system of traditional CMMs (coordinate measuring machines). In order to satisfy increasing demand for highly accurate geometrical measurements on small parts and small structures, a new measuring probe of high sensitivity and small geometrical dimension with low contact forces needs to be developed. In this paper, a novel probing system, which combines a FBG (Fibre Bragg Grating) embedded optical fibre tactile probe with an optical sensing technique, has been proposed. With the sensor elements integrated into the probe tip directly, the system sensitivity can be increased significantly. A preliminary theoretical analysis of the sensitivity of the FBG fibre sensor under axial and lateral end point loading has been presented and the results show that this micro scale probe has great potential to realize a resolution of 1nanometer on geometrical measurement of small parts.
Language eng
Field of Research 090606 Photonics and Electro-Optical Engineering (excl Communications)
HERDC Research category E1.1 Full written paper - refereed
Persistent URL http://hdl.handle.net/10536/DRO/DU:30026028

Document type: Conference Paper
Collection: Centre for Material and Fibre Innovation
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