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Development of a photolithography distribution scheme in semiconductor wafer fabrication

Lung, Dragon K. P., Kong, Ling Xue and Hsu, Hung-Yao 2005, Development of a photolithography distribution scheme in semiconductor wafer fabrication, International journal of agile manufacturing, vol. 8, no. 1, pp. 115-122.


Title Development of a photolithography distribution scheme in semiconductor wafer fabrication
Author(s) Lung, Dragon K. P.
Kong, Ling Xue
Hsu, Hung-Yao
Journal name International journal of agile manufacturing
Volume number 8
Issue number 1
Start page 115
End page 122
Publisher International Society of Agile Manufacturing
Place of publication Lafayette, La.
Publication date 2005
ISSN 1536-2639
Language eng
Field of Research 091306 Microelectromechanical Systems (MEMS)
090604 Microelectronics and Integrated Circuits
HERDC Research category C1.1 Refereed article in a scholarly journal
Persistent URL http://hdl.handle.net/10536/DRO/DU:30026133

Document type: Journal Article
Collection: Institute for Technology Research and Innovation
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