Effect of microstructure on surface roughness of micro-scale metallic components fabricated by focused Ion beam
Hosokawa, H., Shimojima, K., Chino, Y., Yamada, Y., Wen, C.E. and Mabuchi, M. 2002, Effect of microstructure on surface roughness of micro-scale metallic components fabricated by focused Ion beam, in Proceedings : Papers, Keynotes and Plenaries of Materials Week 2002, the European Congress on Advanced Materials and Processes, Werkstoff-Informationsges, Frankfurt, Germany.
Title
Effect of microstructure on surface roughness of micro-scale metallic components fabricated by focused Ion beam