Fabrication of nanoscale Ti honeycombs by focused ion beam

Hosokawa, H., Shimojima, K., Chino, Y., Yamada, Y., Wen, C. E. and Mabuchi, M. 2003, Fabrication of nanoscale Ti honeycombs by focused ion beam, Materials science and engineering A, vol. 344, no. 1-2, pp. 365-367, doi: 10.1016/S0921-5093(02)00441-0.

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Title Fabrication of nanoscale Ti honeycombs by focused ion beam
Author(s) Hosokawa, H.
Shimojima, K.
Chino, Y.
Yamada, Y.
Wen, C. E.
Mabuchi, M.
Journal name Materials science and engineering A
Volume number 344
Issue number 1-2
Start page 365
End page 367
Total pages 3
Publisher Elsevier S. A.
Place of publication Lausanne, Switzerland
Publication date 2003
ISSN 0921-5093
Keyword(s) Ti honeycombs
nocused ion beam
nanoscale Ti
Summary Ti honeycombs with the side of 800 and 400 nm were fabricated by focused ion beam (FIB), though the surfaces of the bottom and wall of the Ti honeycombs were rough, as compared with the surfaces of the bottom and wall of the Si honeycomb. It is demonstrated that the nanoscale Ti components can be fabricated in a short time by FIB.
Language eng
DOI 10.1016/S0921-5093(02)00441-0
Field of Research 100707 Nanomanufacturing
091207 Metals and Alloy Materials
HERDC Research category C1.1 Refereed article in a scholarly journal
Copyright notice ©2002, Elsevier Science B. V.
Persistent URL http://hdl.handle.net/10536/DRO/DU:30026252

Document type: Journal Article
Collection: Centre for Material and Fibre Innovation
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