Fabrication of nanoscale Ti honeycombs by focused ion beam
Hosokawa, H., Shimojima, K., Chino, Y., Yamada, Y., Wen, C. E. and Mabuchi, M. 2003, Fabrication of nanoscale Ti honeycombs by focused ion beam, Materials science and engineering A, vol. 344, no. 1-2, pp. 365-367.
Title
Fabrication of nanoscale Ti honeycombs by focused ion beam
Ti honeycombs with the side of 800 and 400 nm were fabricated by focused ion beam (FIB), though the surfaces of the bottom and wall of the Ti honeycombs were rough, as compared with the surfaces of the bottom and wall of the Si honeycomb. It is demonstrated that the nanoscale Ti components can be fabricated in a short time by FIB.
Language
eng
Field of Research
100707 Nanomanufacturing 091207 Metals and Alloy Materials