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Development of a contact probe incorporating a bragg grating strain sensor for nano coordinate measuring machines

Ji, H., Hsu, H - Y, Kong, L. X. and Wedding, A. B. 2009, Development of a contact probe incorporating a bragg grating strain sensor for nano coordinate measuring machines, Measurement science and technology, vol. 20, no. 9, pp. 1-7.

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Title Development of a contact probe incorporating a bragg grating strain sensor for nano coordinate measuring machines
Author(s) Ji, H.
Hsu, H - Y
Kong, L. X.
Wedding, A. B.
Journal name Measurement science and technology
Volume number 20
Issue number 9
Start page 1
End page 7
Total pages 7
Publisher Institute of Physics Publishing Ltd.
Place of publication Bristol, England
Publication date 2009-09
ISSN 0957-0233
1361-6501
Summary This paper presents a novel optical fibre based micro contact probe system with high sensitivity and repeatability. In this optical fibre probe with a fused spherical tip, a fibre Bragg grating has been utilized as a strain sensor in the probe stem. When the probe tip contacts the surface of the part, a strain will be induced along the probe stem and will produce a Bragg wavelength shift. The contact signal can be issued once the wavelength shift signal is produced and demodulated. With the fibre grating sensor element integrated into the probe directly, the probe system shows a high sensitivity. In this work, the strain distributions along the probe stem with the probe under axial and lateral load are analysed. A simulation of the strain distribution was performed using the finite element package ANSYS 11. Performance tests using a piezoelectric transducer stage with a displacement resolution of 1.5 nm yielded a measurement resolution of 60 nm under axial loading.
Language eng
Field of Research 020502 Lasers and Quantum Electronics
Socio Economic Objective 861402 Appliances and Electrical Machinery and Equipment
HERDC Research category C1 Refereed article in a scholarly journal
ERA Research output type C Journal article
HERDC collection year 2009
Copyright notice ©2009, IOP Publishing Ltd
Persistent URL http://hdl.handle.net/10536/DRO/DU:30028490

Document type: Journal Article
Collection: Centre for Material and Fibre Innovation
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Created: Mon, 03 May 2010, 14:26:34 EST by Lingxue Kong