A micromechanical biosensor with interdigitated capacitor readout

Lim, Yang Choon, Kouzani, Abbas, Kaynak, Akif, Al-Ameri, Riyadh and Duan, Wei 2011, A micromechanical biosensor with interdigitated capacitor readout, in CME 2011 : Proceedings of the 2011 IEEE/ICME International Conference on Complex Medical Engineering, IEEE, [Harbin Heilongjiang, China], pp. 42-46.

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Title A micromechanical biosensor with interdigitated capacitor readout
Author(s) Lim, Yang Choon
Kouzani, AbbasORCID iD for Kouzani, Abbas orcid.org/0000-0002-6292-1214
Kaynak, AkifORCID iD for Kaynak, Akif orcid.org/0000-0002-6679-657X
Al-Ameri, RiyadhORCID iD for Al-Ameri, Riyadh orcid.org/0000-0003-1881-1787
Duan, WeiORCID iD for Duan, Wei orcid.org/0000-0001-5782-9184
Conference name Complex Medical Engineering. Conference (5th : 2011 : Harbin Heilongjian, China)
Conference location Harbin Heilongjiang, China
Conference dates 22-25 May 2011
Title of proceedings CME 2011 : Proceedings of the 2011 IEEE/ICME International Conference on Complex Medical Engineering
Editor(s) [Unknown]
Publication date 2011
Conference series Complex Medical Engineering. Conference
Start page 42
End page 46
Total pages 5
Publisher IEEE
Place of publication [Harbin Heilongjiang, China]
Keyword(s) beam
interdigitated capacitor
surface stress
Summary The growing demands of high-throughput, accurate and fast response biological or chemical sensors are driving the development of new detection technologies. This paper presents a micromechanical biosensor with capacitive read-out method. The proposed biosensor design consists of a fixed-fixed beam attached to an interdigitated capacitor. Implementation of the interdigitated capacitor design improves the sensitivity of the biosensor. The effects of the electrode thickness, length and the number of electrode fingers on the change of capacitance are investigated. The results show that the percentage change of capacitance is proportional to the number of the electrode fingers. Similarly, the increase in the length of the electrodes results in an increase in the percentage change of the capacitance. However, as the thickness of the electrode increases, the percentage change of the capacitance decreases.
ISBN 1424493242
Language eng
Field of Research 091306 Microelectromechanical Systems (MEMS)
Socio Economic Objective 861502 Medical Instruments
HERDC Research category E1 Full written paper - refereed
Copyright notice ©2011, IEEE
Persistent URL http://hdl.handle.net/10536/DRO/DU:30042368

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