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Focused ion-beam (FIB) fabrication of micro-sized pillars for microcompression test

Wang, Jiangting 2012, Focused ion-beam (FIB) fabrication of micro-sized pillars for microcompression test [data collection].


Field of Research 091207 Metals and Alloy Materials
Type of research activity Experimental development
Name of data collection Focused ion-beam (FIB) fabrication of micro-sized pillars for microcompression test
Creator(s) Wang, Jiangting
Contributor(s) Hodgson, Peter
Date completed 2012-07-05
ANDS collection type dataset
Collection start date 2012-02-01
Collection end date 2013-02-01
Description of resource 57 tif images organised into 4 folders
Keyword(s) FIB
Focused ion-beam
microcompression
Language eng
Summary Pillars were fabricated by focused-ion beam (FIB) in a dual beam scanning electron microscope (SEM, FEI Quanta 3D). A multi-step milling procedure was adopted to prepare the pillars using Ga+ ion beam operated at 30 kV. The beam current was reduced from 5 nA for coarse milling down to 50 pA for fine milling, to minimize the surface damage induced by the Ga+ ion beam. The pillars were imaged at 52° tilt angle by SEM prior to the microcompression tests.
General notes Size_OR_DURATION: 140MB.
Contact details (email) jiangting.w@research.deakin.edu.au
Access conditions Access restrictions currently apply to the research data. Enquiries should be addressed via email to jiangting.w@research.deakin.edu.au
Persistent URL http://hdl.handle.net/10536/DRO/DU:30046069

Document type: Data Collection
Collection: Datasets collection
 
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Created: Thu, 05 Jul 2012, 10:00:00 EST

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