Low actuation-voltage shift in MEMS switch using ramp dual-pulse

Zarghami, Majid, Mafinejad, Yasser, Kouzani, Abbas and Mafinezhad, Khalil 2012, Low actuation-voltage shift in MEMS switch using ramp dual-pulse, IEICE electronics express, vol. 9, no. 12, pp. 1062-1068.

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Title Low actuation-voltage shift in MEMS switch using ramp dual-pulse
Author(s) Zarghami, Majid
Mafinejad, Yasser
Kouzani, AbbasORCID iD for Kouzani, Abbas orcid.org/0000-0002-6292-1214
Mafinezhad, Khalil
Journal name IEICE electronics express
Volume number 9
Issue number 12
Start page 1062
End page 1068
Total pages 7
Publisher Denshi Jouhou Tsuushin Gakkai (Institute of Electronics Information and Communication Engineers)
Place of publication Tokyo, Japan
Publication date 2012
ISSN 1349-2543
Keyword(s) actuation
Summary This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped charge density in the dielectric. The results show that the proposed actuation-voltage waveform successfully reduces trapped charge and increases lifetime due to lowering of actuation-voltage shift. Using the proposed actuation-voltage waveform, the membrane reaches a steady state on the electrode faster.
Language eng
Field of Research 091306 Microelectromechanical Systems (MEMS)
Socio Economic Objective 861701 Network Infrastructure Equipment
HERDC Research category C1 Refereed article in a scholarly journal
Copyright notice ©2012, The Authors
Persistent URL http://hdl.handle.net/10536/DRO/DU:30046894

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