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Low actuation-voltage shift in MEMS switch using ramp dual-pulse

Zarghami, Majid, Mafinejad, Yasser, Kouzani, Abbas and Mafinezhad, Khalil 2012, Low actuation-voltage shift in MEMS switch using ramp dual-pulse, IEICE electronics express, vol. 9, no. 12, pp. 1062-1068.

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Title Low actuation-voltage shift in MEMS switch using ramp dual-pulse
Author(s) Zarghami, Majid
Mafinejad, Yasser
Kouzani, Abbas
Mafinezhad, Khalil
Journal name IEICE electronics express
Volume number 9
Issue number 12
Start page 1062
End page 1068
Total pages 7
Publisher Denshi Jouhou Tsuushin Gakkai (Institute of Electronics Information and Communication Engineers)
Place of publication Tokyo, Japan
Publication date 2012
ISSN 1349-2543
1349-9467
Keyword(s) actuation
charging
dielectric
lifetime
MEMS
Summary This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped charge density in the dielectric. The results show that the proposed actuation-voltage waveform successfully reduces trapped charge and increases lifetime due to lowering of actuation-voltage shift. Using the proposed actuation-voltage waveform, the membrane reaches a steady state on the electrode faster.
Language eng
Field of Research 091306 Microelectromechanical Systems (MEMS)
Socio Economic Objective 861701 Network Infrastructure Equipment
HERDC Research category C1 Refereed article in a scholarly journal
Copyright notice ©2012, The Authors
Persistent URL http://hdl.handle.net/10536/DRO/DU:30046894

Document type: Journal Article
Collections: School of Engineering
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Every reasonable effort has been made to ensure that permission has been obtained for items included in DRO. If you believe that your rights have been infringed by this repository, please contact drosupport@deakin.edu.au.