Fluidized bed reactor chemical vapor deposition (FBR-CVD) has been used to enrich the surface of oxygen free high conductivity (OFHC) copper with titanium, silicon and aluminum. This technique enables the production of coherent and adherent intermetallic surface layers of uniform thickness and high hardness. The characterization of the coatings was performed using backscatter scanning electron microscopy (BS-SEM), X-ray diffraction (XRD), glow discharge optical emission spectroscopy (GDOES) and micro-hardness. The tribological properties of the coatings in dry sliding contact with steel were evaluated by pin-on-disc wear testing.
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