X-ray diffraction line broadening from gold and platinum thin films

Lynch, P.A., Cheary, R.W., Dooryhee, E., Armstrong, N. and Tang, C. 2001, X-ray diffraction line broadening from gold and platinum thin films, Materials science forum, vol. 378-381, pp. 358-363, doi: 10.4028/www.scientific.net/MSF.378-381.358.

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Title X-ray diffraction line broadening from gold and platinum thin films
Author(s) Lynch, P.A.
Cheary, R.W.
Dooryhee, E.
Armstrong, N.
Tang, C.
Journal name Materials science forum
Volume number 378-381
Start page 358
End page 363
Total pages 6
Publisher Trans Tech Publications
Place of publication Stafa-Zurich, Switzerland
Publication date 2001
ISSN 0255-5476
Keyword(s) contrast factors
thin films
x-ray line broadening
Summary X-ray diffraction line profile analysis has been used to study the microstructure of (Ill) oriented gold and platinum thin films deposited by thermal evaporation and DC magnetron sputtering. In addition to crystallite size broadening, the profiles from these films displayed broadening arising from dislocations. A parallel investigation, using transmission electron microscopy (TEM) was undertaken to study the nature of dislocations formed, and to provide information on the dimensions of the crystallite columns in the films. X-ray data were collected at room temperature to determine the anisotropy of the broadening with (hkl), using a Siemens D5000 powder diffractometer (CuKa radiation) and two high-resolution synchrotron instruments (BM 16 at the ESRF [A=0.35A] and station 2.3 at the Daresbury laboratory. Two approaches to instrument deconvolution were investigated; Fourier deconvolution and fundamental parameters profile fitting, using Lab6 as a reference material to determine the instrument profile function. After removal of the crystallite size broadening contribution from the measured integral breadths, the residual microstrain broadening was modelled assuming dislocations based on a FCC a/2<110>{ Ill} slip system. The results of the X-ray analysis agreed with dark field TEM micrographs, which showed that many of the crystallites contained dislocations of mixed character (screw- edge).
Notes This paper was presented at the 7th European Powder Diffraction Conference; Barcelona; Spain; 20 May 2000 through 23 May 2000
Language eng
DOI 10.4028/www.scientific.net/MSF.378-381.358
Field of Research 029999 Physical Sciences not elsewhere classified
Socio Economic Objective 970102 Expanding Knowledge in the Physical Sciences
HERDC Research category C1.1 Refereed article in a scholarly journal
Copyright notice ©2001, Trans Tech Publications
Persistent URL http://hdl.handle.net/10536/DRO/DU:30052456

Document type: Journal Article
Collection: Institute for Frontier Materials
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