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Two-step chemical mechanical polishing of sapphire substrate

Zhang, Zefang, Liu, Weili, Song, Zhitang and Hu, Xiaokai 2010, Two-step chemical mechanical polishing of sapphire substrate, Journal of the electrochemical society, vol. 157, no. 6, pp. H688-H691, doi: 10.1149/1.3410116.

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Title Two-step chemical mechanical polishing of sapphire substrate
Author(s) Zhang, Zefang
Liu, Weili
Song, Zhitang
Hu, Xiaokai
Journal name Journal of the electrochemical society
Volume number 157
Issue number 6
Start page H688
End page H691
Total pages 4
Publisher Electrochemical Society
Place of publication New York, N.Y.
Publication date 2010
ISSN 0013-4651
1945-7111
Keyword(s) chemical mechanical polishing
friction
planarisation
sapphire
substrates
surface topography measurement
Language eng
DOI 10.1149/1.3410116
Field of Research 039999 Chemical Sciences not elsewhere classified
Socio Economic Objective 970103 Expanding Knowledge in the Chemical Sciences
HERDC Research category C1.1 Refereed article in a scholarly journal
Persistent URL http://hdl.handle.net/10536/DRO/DU:30052755

Document type: Journal Article
Collection: Institute for Frontier Materials
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