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Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation

Zhang, Zefang, Liu, Weili, Song, Zhi-Tang and Hu, Xiaokai 2009, Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation, ECS transactions, vol. 18, no. 1, pp. 559-564, doi: 10.1149/1.3096502.

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Title Synthesis of spherical-like ceria particle with PVP as assistant agent and its CMP performance on shallow trench isolation
Author(s) Zhang, Zefang
Liu, Weili
Song, Zhi-Tang
Hu, Xiaokai
Journal name ECS transactions
Volume number 18
Issue number 1
Start page 559
End page 564
Total pages 6
Publisher Electrochemical Society
Place of publication Pennington, N.J.
Publication date 2009
ISSN 1938-5862
1938-6737
Notes
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Paper presented at the ISTC/CSTIC 2009 (CISTC); Shanghai; China; 19 March 2009 through 20 March 2009
Language eng
DOI 10.1149/1.3096502
Field of Research 039999 Chemical Sciences not elsewhere classified
Socio Economic Objective 970103 Expanding Knowledge in the Chemical Sciences
HERDC Research category C1.1 Refereed article in a scholarly journal
Persistent URL http://hdl.handle.net/10536/DRO/DU:30052757

Document type: Journal Article
Collection: Faculty of Science, Engineering and Built Environment
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