Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys

Mafinejad, Yasser, Kouzani, Abbas and Mafinezhad, Khalil 2013, Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys, Journal of microelectronics, electric components and materials, vol. 43, no. 2, pp. 85-96.

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Title Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys
Author(s) Mafinejad, Yasser
Kouzani, AbbasORCID iD for Kouzani, Abbas
Mafinezhad, Khalil
Journal name Journal of microelectronics, electric components and materials
Volume number 43
Issue number 2
Start page 85
End page 96
Total pages 12
Publisher Strokovno Drustvo za Mikroelektroniko, Elektronske Sestavne Dele in Materiale (MIDEM)
Place of publication Ljubljana, Slovenia
Publication date 2013
ISSN 0352-9045
Keyword(s) low actuation voltage
metallic and carbon alloys
RF MEMS switch
RF parameters
Summary Radio frequency micro electro mechanical systems (RF MEMS) have enabled a new generation of devices that bring many advantages due to their very high performances. There are many incentives for the integration of the RF MEMS switches and electronic devices on the same chip. However, the high actuation voltage of RF MEMS switches compared to electronic devices poses a major problem. By reducing the actuation voltage of the RF MEMS switch, it is possible to integrate it into current electronic devices. Lowering the actuation voltage will have an impact on RF parameters of the RF MEMS switches. This investigation focuses on recent progress in reducing the actuation voltage with an emphasis on a modular approach that gives acceptable design parameters. A number of rules that should be considered in design and fabrication of low actuation RF MEMS switches are suggested.
Language eng
Field of Research 091306 Microelectromechanical Systems (MEMS)
090604 Microelectronics and Integrated Circuits
Socio Economic Objective 861603 Integrated Circuits and Devices
HERDC Research category C1 Refereed article in a scholarly journal
Copyright notice ©2013, MIDEM
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Document type: Journal Article
Collection: School of Engineering
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