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Energetic deposition of carbon in a cathodic vacuum arc with a biased mesh

Moafi, A., Lau, D. W. M., Sadek, A. Z., Partridge, J. G., McKenzie, D. R. and McCulloch, D. G. 2011, Energetic deposition of carbon in a cathodic vacuum arc with a biased mesh, Journal of applied physics, vol. 109, no. 7, Article No. 073309, pp. 1-6, doi: 10.1063/1.3562165.

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Title Energetic deposition of carbon in a cathodic vacuum arc with a biased mesh
Author(s) Moafi, A.
Lau, D. W. M.
Sadek, A. Z.
Partridge, J. G.
McKenzie, D. R.
McCulloch, D. G.
Journal name Journal of applied physics
Volume number 109
Issue number 7
Season Article No. 073309
Start page 1
End page 6
Total pages 6
Publisher American Institute of Physics
Place of publication College Park, Md.
Publication date 2011-04-01
ISSN 0021-8979
1089-7550
Keyword(s) cathodic vacuum arc
bias potential
plasma stream
substrate bias
carbon films
Notes Conference paper
Language eng
DOI 10.1063/1.3562165
Field of Research 109999 Technology not elsewhere classified
Socio Economic Objective 970110 Expanding Knowledge in Technology
HERDC Research category C1.1 Refereed article in a scholarly journal
Copyright notice ©2011, American Institute of Physics
Persistent URL http://hdl.handle.net/10536/DRO/DU:30055952

Document type: Journal Article
Collections: Institute for Frontier Materials
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Every reasonable effort has been made to ensure that permission has been obtained for items included in DRO. If you believe that your rights have been infringed by this repository, please contact drosupport@deakin.edu.au.