Synthesis and growth mechanism of Thin-film TiO2 nanotube arrays on focused-ion-beam micropatterned 3D isolated regions of titanium on silicon

Hamedani, Hoda Amani, Lee, Simon W., Al-Sammarraie, Abdulkareem, Hesabi, Zohreh R., Bhatti, Asim, Alamgir, Faisal M., Garmestani, Hamid and Khaleel, Mohammad A. 2013, Synthesis and growth mechanism of Thin-film TiO2 nanotube arrays on focused-ion-beam micropatterned 3D isolated regions of titanium on silicon, ACS applied materials and interfaces, vol. 5, no. 18, pp. 9026-9033.

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Title Synthesis and growth mechanism of Thin-film TiO2 nanotube arrays on focused-ion-beam micropatterned 3D isolated regions of titanium on silicon
Author(s) Hamedani, Hoda Amani
Lee, Simon W.
Al-Sammarraie, Abdulkareem
Hesabi, Zohreh R.
Bhatti, Asim
Alamgir, Faisal M.
Garmestani, Hamid
Khaleel, Mohammad A.
Journal name ACS applied materials and interfaces
Volume number 5
Issue number 18
Start page 9026
End page 9033
Total pages 8
Publisher American Chemical Society
Place of publication Washington, D.C.
Publication date 2013
ISSN 1944-8244
1944-8252
Keyword(s) electrochemical anodization
focused ion beam
micropatterning
thin-film TiO2 nanotubes
XPS
XRD
Summary In this paper, the fabrication and growth mechanism of net-shaped micropatterned self-organized thin-film TiO2 nanotube (TFTN) arrays on a silicon substrate are reported. Electrochemical anodization is used to grow the nanotubes from thin-film titanium sputtered on a silicon substrate with an average diameter of ?30 nm and a length of ?1.5 ?m using aqueous and organic-based types of electrolytes. The fabrication and growth mechanism of TFTN arrays from micropatterned three-dimensional isolated islands of sputtered titanium on a silicon substrate is demonstrated for the first time using focused-ion-beam (FIB) technique. This work demonstrates the use of the FIB technique as a simple, high-resolution, and maskless method for high-aspect-ratio etching for the creation of isolated islands and shows great promise toward the use of the proposed approach for the development of metal oxide nanostructured devices and their integration with micro- and nanosystems within silicon-based integrated-circuit devices.
Language eng
Field of Research 089999 Information and Computing Sciences not elsewhere classified
Socio Economic Objective 970108 Expanding Knowledge in the Information and Computing Sciences
HERDC Research category C1 Refereed article in a scholarly journal
Copyright notice ©2013, American Chemical Society
Persistent URL http://hdl.handle.net/10536/DRO/DU:30058841

Document type: Journal Article
Collection: Centre for Intelligent Systems Research
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