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Characterization and optimization to improve uneven surface on MEMS bridge fabrication

Mafinejad,Y, Kouzani,AZ, Nassabi,M, Lim,Y and Mafinezhad,K 2015, Characterization and optimization to improve uneven surface on MEMS bridge fabrication, Displays, vol. 37, pp. 54-61, doi: 10.1016/j.displa.2014.08.004.

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Title Characterization and optimization to improve uneven surface on MEMS bridge fabrication
Author(s) Mafinejad,Y
Kouzani,AZORCID iD for Kouzani,AZ orcid.org/0000-0002-6292-1214
Nassabi,M
Lim,Y
Mafinezhad,K
Journal name Displays
Volume number 37
Start page 54
End page 61
Total pages 8
Publisher Elsevier
Publication date 2015
ISSN 0141-9382
Keyword(s) Dry release
Extra hard bake
Flatness
Reflow
RF MEMS bridge
Smoothness
Science & Technology
Technology
Physical Sciences
Computer Science, Hardware & Architecture
Engineering, Electrical & Electronic
Instruments & Instrumentation
Optics
Computer Science
Engineering
ACTUATION VOLTAGE
PHOTORESIST
SWITCHES
PLANARIZATION
MORPHOLOGIES
Summary This paper presents an optimized fabrication method for developing a freestanding bridge for RF MEMS switches. In this method, the sacrificial layer is patterned and hard baked a 220°C for 3min, after filling the gap between the slots of the coplanar waveguide. Measurement results by AFM and SEM demonstrate that this technique significantly improves the planarity of the sacrificial layer, reducing the uneven surface to less than 20nm, and the homogeneity of the Aluminum thickness across the bridge. Moreover, a mixture of O2, Ar and CF4 was used and optimized for dry releasing of the bridge. A large membrane (200×100μm2) was released without any surface bending. Therefore, this method not only simplifies the fabrication process, but also improves the surface flatness and edge smoothness of the bridge. This fabrication method is fully compatible with standard silicon IC technology.
Language eng
DOI 10.1016/j.displa.2014.08.004
Field of Research 091306 Microelectromechanical Systems (MEMS)
Socio Economic Objective 861503 Scientific Instruments
HERDC Research category C1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2015, Elsevier
Persistent URL http://hdl.handle.net/10536/DRO/DU:30072714

Document type: Journal Article
Collection: School of Engineering
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