Nanopatterning and electrical tuning of MoS2 layers with a subnanometer helium ion beam

Fox, Daniel S., Zhou, Yangbo, Maguire, Pierce, O'Neill, Arlene, Ó'Coileáin, Cormac, Gatensby, Riley, Glushenkov, Alexey M., Tao, Tao, Duesberg, Georg S., Shvets, Igor V., Abid, Mohamed, Abid, Mourad, Wu, Han-Chun, Chen, Ying, Coleman, Jonathan N., Donegan, John F. and Zhang, Hongzhou 2015, Nanopatterning and electrical tuning of MoS2 layers with a subnanometer helium ion beam, Nano letters, vol. 15, no. 8, pp. 5307-5313, doi: 10.1021/acs.nanolett.5b01673.

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Title Nanopatterning and electrical tuning of MoS2 layers with a subnanometer helium ion beam
Author(s) Fox, Daniel S.
Zhou, Yangbo
Maguire, Pierce
O'Neill, Arlene
Ó'Coileáin, Cormac
Gatensby, Riley
Glushenkov, Alexey M.
Tao, Tao
Duesberg, Georg S.
Shvets, Igor V.
Abid, Mohamed
Abid, Mourad
Wu, Han-Chun
Chen, YingORCID iD for Chen, Ying
Coleman, Jonathan N.
Donegan, John F.
Zhang, Hongzhou
Journal name Nano letters
Volume number 15
Issue number 8
Start page 5307
End page 5313
Total pages 7
Publisher American Chemical Society
Place of publication Washington, D. C.
Publication date 2015-08-12
ISSN 1530-6992
Keyword(s) Helium ion beam
electrical tuning
Science & Technology
Physical Sciences
Chemistry, Multidisciplinary
Chemistry, Physical
Nanoscience & Nanotechnology
Materials Science, Multidisciplinary
Physics, Applied
Physics, Condensed Matter
Science & Technology - Other Topics
Materials Science
Summary We report subnanometer modification enabled by an ultrafine helium ion beam. By adjusting ion dose and the beam profile, structural defects were controllably introduced in a few-layer molybdenum disulfide (MoS2) sample and its stoichiometry was modified by preferential sputtering of sulfur at a few-nanometer scale. Localized tuning of the resistivity of MoS2 was demonstrated and semiconducting, metallic-like, or insulating material was obtained by irradiation with different doses of He(+). Amorphous MoSx with metallic behavior has been demonstrated for the first time. Fabrication of MoS2 nanostructures with 7 nm dimensions and pristine crystal structure was also achieved. The damage at the edges of these nanostructures was typically confined to within 1 nm. Nanoribbons with widths as small as 1 nm were reproducibly fabricated. This nanoscale modification technique is a generalized approach that can be applied to various two-dimensional (2D) materials to produce a new range of 2D metamaterials.
Language eng
DOI 10.1021/acs.nanolett.5b01673
Field of Research 100708 Nanomaterials
100706 Nanofabrication, Growth and Self Assembly
Socio Economic Objective 970102 Expanding Knowledge in the Physical Sciences
HERDC Research category C1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2015, ACS
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Document type: Journal Article
Collection: Institute for Frontier Materials
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