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Development of a low actuation voltage electrostatic RF MEMS switch

Mafi Nejad, Yasser 2015, Development of a low actuation voltage electrostatic RF MEMS switch, PhD (Engineering) thesis, School of Engineering, Deakin Univeristy.

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Title Development of a low actuation voltage electrostatic RF MEMS switch
Author Mafi Nejad, Yasser
Institution Deakin Univeristy
School School of Engineering
Faculty Faculty of Science, Engineering and Built Environment
Degree type Research doctorate
Degree name PhD (Engineering)
Thesis advisor Kouzani, Abbas
Kaynak, Akif
Date submitted 2015-04
Keyword(s) radio frequency microelectromechanical system (RF MEMS) switch
high actuation voltage
low switching speed
dielectric charging
fabrication complexity
Summary The research focused on the design, fabrication and measurement of a low actuation voltage micro electro mechanical high frequency switch. The fabricated micro switch offers outstanding radio frequency parameters for a very large frequency band, with actuation voltage and switching time less than 20 volts and 3 micro seconds, respectively.
Language eng
Field of Research 091306 Microelectromechanical Systems (MEMS)
090604 Microelectronics and Integrated Circuits
Socio Economic Objective 861603 Integrated Circuits and Devices
Description of original 159 pages : illustrations, tables, graphs, some coloured
Dewey Decimal Classification 621.381
Restricted until 2017-06-23
Copyright notice ┬ęThe Author. All Rights Reserved.
Persistent URL http://hdl.handle.net/10536/DRO/DU:30079097

Document type: Thesis
Collection: Higher degree theses (citation only)
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Created: Fri, 23 Oct 2015, 10:44:46 EST by Kate Percival

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