The research focused on the design, fabrication and measurement of a low actuation voltage micro electro mechanical high frequency switch. The fabricated micro switch offers outstanding radio frequency parameters for a very large frequency band, with actuation voltage and switching time less than 20 volts and 3 micro seconds, respectively.
Field of Research
091306 Microelectromechanical Systems (MEMS) 090604 Microelectronics and Integrated Circuits
Socio Economic Objective
861603 Integrated Circuits and Devices
Description of original
159 pages : illustrations, tables, graphs, some coloured
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