Design and simulation of a low-actuation-voltage MEMS switch

Mafinejad, Yasser, Kouzani, Abbas Z. and Matekovits, Ladislau 2015, Design and simulation of a low-actuation-voltage MEMS switch, in BodyNets 2015 : Proceedings of the 10th EAI International Conference on Body Area Networks, ICST, Brussels, Belgium, pp. 132-138, doi: 10.4108/eai.28-9-2015.2261432.

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Title Design and simulation of a low-actuation-voltage MEMS switch
Author(s) Mafinejad, Yasser
Kouzani, Abbas Z.ORCID iD for Kouzani, Abbas Z.
Matekovits, Ladislau
Conference name EAI International Conference on Body Area Networks (10th : 2015 : Sydney, N.S.W.)
Conference location Sydney, N.S.W.
Conference dates 28-30 Sep. 2015
Title of proceedings BodyNets 2015 : Proceedings of the 10th EAI International Conference on Body Area Networks
Publication date 2015
Conference series EAI Conference Series
Start page 132
End page 138
Total pages 7
Publisher ICST
Place of publication Brussels, Belgium
Keyword(s) RF MEMS
Summary This paper presents a low-actuation-voltage micro-electromechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 μs, respectively, with an actuation voltage of less than 15 V.
ISBN 9781631900846
Language eng
DOI 10.4108/eai.28-9-2015.2261432
Field of Research 091306 Microelectromechanical Systems (MEMS)
Socio Economic Objective 861503 Scientific Instruments
HERDC Research category E1 Full written paper - refereed
ERA Research output type E Conference publication
Copyright notice ©2015, ICST
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Document type: Conference Paper
Collection: School of Engineering
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