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Design and fabrication of an electrode for low-actuation-voltage electrowetting-on-dielectric devices

Samad, M.F., Kouzani, A.Z., Rahman, M.M., Magniez, K. and Kaynak, A. 2015, Design and fabrication of an electrode for low-actuation-voltage electrowetting-on-dielectric devices, Procedia technology, vol. 20, pp. 20-25, doi: 10.1016/j.protcy.2015.07.005.

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Title Design and fabrication of an electrode for low-actuation-voltage electrowetting-on-dielectric devices
Author(s) Samad, M.F.
Kouzani, A.Z.
Rahman, M.M.
Magniez, K.
Kaynak, A.
Journal name Procedia technology
Volume number 20
Start page 20
End page 25
Total pages 6
Publisher Elsevier
Place of publication Amsterdam, The Netherlands
Publication date 2015
ISSN 2212-0173
Keyword(s) Electrowetting on dielectic (EWOD)
Electrode
Actuation voltage
Photolithography
Dielectric layer
Hydrophobic layer
Summary This paper presents the design and fabrication of an electrode for low-actuation-voltage electrowetting-on-dielectric (EWOD) devices. The electrode which takes advantage of a novel shape is used to develop an EWOD device. The fabrication process for the electrode and the device development includes laser exposure, wet developing, etching, and stripping. A dielectric layer of 5% (wt./wt.) Polyvinylidene difluoride (PVDF) is used for the electrode insulation. In addition, a very thin (50 nm) layer of Teflon is coated on the EWOD surface to provide hydrophobicity. It is observed that a thin and high dielectric-constant layer can reduce the actuation voltage in the EWOD device. An actuation voltage of 14.8 V was achieved by the EWOD device.
Notes This journal article is from proceedings of the 1st International Design Technology Conference DESTECH2015, 29th June 2015 - 1st July 2015, Geelong, Australia
Language eng
DOI 10.1016/j.protcy.2015.07.005
Field of Research 090304 Medical Devices
Socio Economic Objective 861502 Medical Instruments
HERDC Research category C1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2015, Elsevier
Persistent URL http://hdl.handle.net/10536/DRO/DU:30082759

Document type: Journal Article
Collections: School of Engineering
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