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Reducing electrowetting-on-dielectric actuation voltage using a novel electrode shape and a multi-layer dielectric coating

Samad, M. F., Kouzani, Abbas Z., Hossain, M. F., Mohammed, M, I. and Alam, M. N. H. 2016, Reducing electrowetting-on-dielectric actuation voltage using a novel electrode shape and a multi-layer dielectric coating, Microsystem technologies, In press, pp. 1-9, doi: 10.1007/s00542-016-3087-9.

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Title Reducing electrowetting-on-dielectric actuation voltage using a novel electrode shape and a multi-layer dielectric coating
Author(s) Samad, M. F.
Kouzani, Abbas Z.
Hossain, M. F.
Mohammed, M, I.ORCID iD for Mohammed, M, I. orcid.org/0000-0003-2177-9845
Alam, M. N. H.
Journal name Microsystem technologies
Season In press
Start page 1
End page 9
Total pages 9
Publisher Springer
Place of publication Berlin, Germany
Publication date 2016-07-23
ISSN 0946-7076
Summary This paper presents design and fabrication of an electrowetting-on-dielectric (EWOD) device using a novel electrode shape and a multi-layer dielectric coating that reduce the actuation voltage of the device to less than 12.6 V. The fabrication of the EWOD electrodes is carried out in several steps including laser exposure, wet developing, etching, and stripping. A high-dielectric-constant multi-layer dielectric coating containing a 770 nm thick Polyvinylidene difluoride (PVDF) layer and a 1 µm thick Cyanoethyl pullulan (CEP) layer, is deposited on the EWOD electrodes for insulation. This multi-layer dielectric structure exhibits a high capacitance per unit area, and the novel electrode shape changes the actuation force at the droplet contact line reducing the voltage required to operate the device. In addition, an overlaying Teflon layer of 50 nm is placed on top of the dielectric structure to provide a hydrophobic surface for droplet manipulation. It is observed from the experiments that the electrode shape and the dielectric structure have contributed to the reduction of the actuation voltage of the EWOD device.
Language eng
DOI 10.1007/s00542-016-3087-9
Field of Research 091306 Microelectromechanical Systems (MEMS)
Socio Economic Objective 970109 Expanding Knowledge in Engineering
HERDC Research category C1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2016, Springer-Verlag Berlin Heidelberg
Persistent URL http://hdl.handle.net/10536/DRO/DU:30085734

Document type: Journal Article
Collection: School of Engineering
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