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Electron beam directed etching of hexagonal boron nitride

Elbadawi, Christopher, Tran, Trong Toan, Kolíbal, Miroslav, Šikola, Tomáš, Scott, John, Cai, Qiran, Li, Lu Hua, Taniguchi, Takashi, Watanabe, Kenji, Toth, Milos, Aharonovich, Igor and Lobo, Charlene 2016, Electron beam directed etching of hexagonal boron nitride, Nanoscale, vol. 8, no. 36, pp. 16182-16186, doi: 10.1039/c6nr04959a.

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Title Electron beam directed etching of hexagonal boron nitride
Author(s) Elbadawi, Christopher
Tran, Trong Toan
Kolíbal, Miroslav
Šikola, Tomáš
Scott, John
Cai, Qiran
Li, Lu HuaORCID iD for Li, Lu Hua orcid.org/0000-0003-2435-5220
Taniguchi, Takashi
Watanabe, Kenji
Toth, Milos
Aharonovich, Igor
Lobo, Charlene
Journal name Nanoscale
Volume number 8
Issue number 36
Start page 16182
End page 16186
Total pages 5
Publisher Royal Society of Chemistry Publishing
Place of publication Cambridge, Eng.
Publication date 2016
ISSN 2040-3364
2040-3372
Summary Hexagonal boron nitride (hBN) is a wide bandgap van der Waals material with unique optical properties that make it attractive for two dimensional (2D) photonic and optoelectronic devices. However, broad deployment and exploitation of hBN is limited by alack of suitable material and device processing and nano prototyping techniques. Here we present a high resolution, single step electron beam technique for chemical dry etching of hBN. Etching is achieved using H2O as a precursor gas, at both room temperature and elevated hBN temperatures. The technique enables damage-free, nano scale, iterative patterning of supported and suspended 2D hBN, thus opening the door to facile fabrication of hBN-based 2D heterostructures and devices.
Language eng
DOI 10.1039/c6nr04959a
Field of Research 099999 Engineering not elsewhere classified
10 Technology
02 Physical Sciences
03 Chemical Sciences
Socio Economic Objective 0 Not Applicable
HERDC Research category C1 Refereed article in a scholarly journal
Copyright notice ©2016, The Authors
Free to Read? Yes
Use Rights Creative Commons Attribution non-commercial licence
Persistent URL http://hdl.handle.net/10536/DRO/DU:30089690

Document type: Journal Article
Collections: Institute for Frontier Materials
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Scopus Citation Count Cited 8 times in Scopus
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Created: Wed, 30 Nov 2016, 11:53:23 EST

Every reasonable effort has been made to ensure that permission has been obtained for items included in DRO. If you believe that your rights have been infringed by this repository, please contact drosupport@deakin.edu.au.