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Bulk and surface thermal stability of ultra nanocrystalline diamond films with 10-30 nm grain size prepared by chemical vapor deposition

Michaelson, Sh., Stacey, A., Orwa, J., Cimmino, A., Prawer, S., Cowie, B.C.C., Williams, O.A., Gruen, D.M. and Hoffman, A. 2010, Bulk and surface thermal stability of ultra nanocrystalline diamond films with 10-30 nm grain size prepared by chemical vapor deposition, Journal of applied physics, vol. 107, no. 9, pp. 1-7, doi: 10.1063/1.3359714.

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Title Bulk and surface thermal stability of ultra nanocrystalline diamond films with 10-30 nm grain size prepared by chemical vapor deposition
Author(s) Michaelson, Sh.
Stacey, A.
Orwa, J.ORCID iD for Orwa, J. orcid.org/0000-0001-6041-6751
Cimmino, A.
Prawer, S.
Cowie, B.C.C.
Williams, O.A.
Gruen, D.M.
Hoffman, A.
Journal name Journal of applied physics
Volume number 107
Issue number 9
Article ID 093521
Start page 1
End page 7
Total pages 7
Publisher AIP Publishing
Place of publication Melville, N.Y.
Publication date 2010-05-01
ISSN 0021-8979
Keyword(s) Science & Technology
Physical Sciences
Physics, Applied
Physics
Summary The thermal stability of nanocrystalline diamond films with 10-30 nm grain size deposited by microwave enhanced chemical vapor deposition on silicon substrate was investigated as a function of annealing temperature up to 1200°C. The thermal stability of the surface-upper atomic layers was studied with near edge x-ray absorption fine structure (NEXAFS) spectroscopy recorded in the partial electron yield mode. This technique indicated substantial thermally induced graphitization of the film within a close proximity to the surface. While in the bulk region of the film no graphitization was observed with either Raman spectroscopy or NEXAFS spectroscopy recorded in total electron yield mode, even after annealing to 1200°C. Raman spectroscopy did detect the complete disappearance of transpolyacetylene (t-PA)-like 1 and 3 modes following annealing at 1000°C. Secondary ion mass spectroscopy, applied to investigate this relative decrease in hydrogen atom concentration detected only a ∼30% decrease in the bulk content of hydrogen atoms. This enhanced stability of sp3 hybridized atoms within the bulk region with respect to graphitization is discussed in terms of carbon bond rearrangement due to the thermal decomposition of t-PA-like fragments.
Language eng
DOI 10.1063/1.3359714
Field of Research 020406 Surfaces and Structural Properties of Condensed Matter
Socio Economic Objective 970102 Expanding Knowledge in the Physical Sciences
HERDC Research category C1.1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2010, American Institute of Physics
Persistent URL http://hdl.handle.net/10536/DRO/DU:30091859

Document type: Journal Article
Collections: School of Engineering
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