Thermally induced sp² clustering in tetrahedral amorphous carbon (ta-C) films

Orwa, J.O., Andrienko, I., Peng, J.L., Prawer, S., Zhang, Y.B. and Lau, S.P. 2004, Thermally induced sp² clustering in tetrahedral amorphous carbon (ta-C) films, Journal of applied physics, vol. 96, no. 11, pp. 6286-6297, doi: 10.1063/1.1808918.

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Title Thermally induced sp² clustering in tetrahedral amorphous carbon (ta-C) films
Author(s) Orwa, J.O.ORCID iD for Orwa, J.O.
Andrienko, I.
Peng, J.L.
Prawer, S.
Zhang, Y.B.
Lau, S.P.
Journal name Journal of applied physics
Volume number 96
Issue number 11
Start page 6286
End page 6297
Total pages 12
Publisher AIP Publishing
Place of publication Melville, N.Y.
Publication date 2004-12-01
ISSN 0021-8979
Summary Tetrahedral amorphous carbon films with 70%-88% sp3 content are studied by atomic force microscopy (AFM), transmission electron microscopy (TEM), and Raman spectroscopy as a function of annealing temperature in the range 25-1100°C. Using a high-resolution AFM current imaging, we directly image the formation and growth of conducting graphitic (sp2-bonded) nanoclusters in the ta-C films. Overall results from all the techniques used show that the structural and electronic changes in the films depend sensitively on the initial sp3 content. Cross-sectional TEM confirms that the clusters appear not only at the surface of the films but in the bulk as well. The growth and, perhaps, the partial orientation of the sp2-bonded nanoclusters in the size range of 1-3 nm is accompanied by a large reduction in the film stress, which decreases sharply in the temperature range 500-600°C.
Language eng
DOI 10.1063/1.1808918
Field of Research 020406 Surfaces and Structural Properties of Condensed Matter
Socio Economic Objective 970102 Expanding Knowledge in the Physical Sciences
HERDC Research category C1.1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2004, American Institute of Physics
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