Correlation between crystalline perfection and film purity for chemically vapor deposited diamond thin films grown on fused quartz substrates

Prawer, Steven, Hoffman, Alon, Stuart, Sue-Anne, Manory, Rafael, Weiser, Paul, Lim, Cheryl S., Long, John M. and Ninio, Fred 1991, Correlation between crystalline perfection and film purity for chemically vapor deposited diamond thin films grown on fused quartz substrates, Journal of applied physics, vol. 69, no. 9, pp. 6625-6631, doi: 10.1063/1.348876.

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Title Correlation between crystalline perfection and film purity for chemically vapor deposited diamond thin films grown on fused quartz substrates
Author(s) Prawer, Steven
Hoffman, Alon
Stuart, Sue-Anne
Manory, Rafael
Weiser, Paul
Lim, Cheryl S.
Long, John M.ORCID iD for Long, John M. orcid.org/0000-0001-6110-5904
Ninio, Fred
Journal name Journal of applied physics
Volume number 69
Issue number 9
Start page 6625
End page 6631
Total pages 7
Publisher AIP Publishing
Place of publication Melville, N.Y.
Publication date 1991-05-01
ISSN 0021-8979
1089-7550
Keyword(s) thin films
diamond
elemental semiconductors
thin film growth
thin film flows
Language eng
DOI 10.1063/1.348876
Field of Research 091201 Ceramics
01 Mathematical Sciences
02 Physical Sciences
09 Engineering
Socio Economic Objective 970109 Expanding Knowledge in Engineering
HERDC Research category CN.1 Other journal article
Copyright notice ©1991, AIP
Persistent URL http://hdl.handle.net/10536/DRO/DU:30095088

Document type: Journal Article
Collection: School of Engineering
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