Characteristics of Nanocomposite ZrO<SUB>2</SUB>/Al<SUB>2</SUB>O<SUB>3</SUB> Films Deposited by Plasma-Enhanced Atomic Layer Deposition

Yun, SJ, Lim, JW and Kim, H-T 2007, Characteristics of Nanocomposite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition, Journal of Nanoscience and Nanotechnology, vol. 7, no. 11, pp. 4180-4184, doi: 10.1166/jnn.2007.116.


Title Characteristics of Nanocomposite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
Author(s) Yun, SJ
Lim, JW
Kim, H-T
Journal name Journal of Nanoscience and Nanotechnology
Volume number 7
Issue number 11
Start page 4180
End page 4184
Total pages 5
Publisher American Scientific Publishers
Publication date 2007-11-01
ISSN 1533-4880
Language eng
DOI 10.1166/jnn.2007.116
Field of Research 09 Engineering
10 Technology
03 Chemical Sciences
HERDC Research category CN.1 Other journal article
Persistent URL http://hdl.handle.net/10536/DRO/DU:30095847

Document type: Journal Article
Collection: Institute for Frontier Materials
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