Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters

Williams, J. S., Chen, Ying, Wong-Leung, J., Kerr, A. and Swain, M. V. 1999, Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters, Journal of materials research, vol. 14, no. 6, pp. 2338-2343, doi: 10.1557/JMR.1999.0310.

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Title Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters
Author(s) Williams, J. S.
Chen, YingORCID iD for Chen, Ying orcid.org/0000-0002-7322-2224
Wong-Leung, J.
Kerr, A.
Swain, M. V.
Journal name Journal of materials research
Volume number 14
Issue number 6
Start page 2338
End page 2343
Total pages 6
Publisher Cambridge University Press
Place of publication New York, N.Y.
Publication date 1999-06
ISSN 0884-2914
2044-5326
Language eng
DOI 10.1557/JMR.1999.0310
Field of Research 0912 Materials Engineering
0204 Condensed Matter Physics
0913 Mechanical Engineering
HERDC Research category C1.1 Refereed article in a scholarly journal
Copyright notice ©1999, Materials Research Society
Persistent URL http://hdl.handle.net/10536/DRO/DU:30096526

Document type: Journal Article
Collections: Institute for Frontier Materials
GTP Research
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