Maskless photolithography using UV LEDs

Guijt, Rosanne M. and Breadmore, MC 2008, Maskless photolithography using UV LEDs, Lab on a chip, vol. 8, no. 8, pp. 1402-1404, doi: 10.1039/b800465j.

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Title Maskless photolithography using UV LEDs
Author(s) Guijt, Rosanne M.ORCID iD for Guijt, Rosanne M. orcid.org/0000-0003-0011-5708
Breadmore, MC
Journal name Lab on a chip
Volume number 8
Issue number 8
Start page 1402
End page 1404
Total pages 3
Publisher Royal Society of Chemistry
Place of publication England
Publication date 2008
ISSN 1473-0197
Keyword(s) Science & Technology
Life Sciences & Biomedicine
Physical Sciences
Biochemical Research Methods
Chemistry, Multidisciplinary
Chemistry, Analytical
Nanoscience & Nanotechnology
Biochemistry & Molecular Biology
Chemistry
Science & Technology - Other Topics
MICROFLUIDIC SYSTEMS
FABRICATION
POLY(DIMETHYLSILOXANE)
MICROFABRICATION
MICROCHIP
CHIPS
Language eng
DOI 10.1039/b800465j
Field of Research 03 Chemical Sciences
09 Engineering
HERDC Research category CN.1 Other journal article
Persistent URL http://hdl.handle.net/10536/DRO/DU:30098672

Document type: Journal Article
Collection: Faculty of Science, Engineering and Built Environment
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