CO2 laser machining of fully packaged autonomous microfluidic systems

Mohammed, Mazher I and Desmulliez, MPY 2012, CO2 laser machining of fully packaged autonomous microfluidic systems, in DTIP 2012 : Proceedings of the 2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Institute of Electrical and Electronics Engineers, Piscataway, N.J., pp. 1-8.

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Title CO2 laser machining of fully packaged autonomous microfluidic systems
Author(s) Mohammed, Mazher IORCID iD for Mohammed, Mazher I orcid.org/0000-0003-2177-9845
Desmulliez, MPY
Conference name IEEE Components, Packaging and Manufacturing Technology Society. Conference (2012 : Cannes, France)
Conference location Cannes, France
Conference dates 2012/04/25 - 2012/04/27
Title of proceedings DTIP 2012 : Proceedings of the 2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Editor(s) [Unknown]
Publication date 2012
Series IEEE Components, Packaging and Manufacturing Technology Society Conference
Start page 1
End page 8
Total pages 8
Publisher Institute of Electrical and Electronics Engineers
Place of publication Piscataway, N.J.
Keyword(s) valves
pumps
fluids
microfluidics
substrates
etching
geometry
ISBN 9781467307857
Language eng
HERDC Research category E1.1 Full written paper - refereed
ERA Research output type E Conference publication
Copyright notice ©2012, EDA Publishing/DTIP
Persistent URL http://hdl.handle.net/10536/DRO/DU:30101176

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