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Enhanced deposition of ZnO films by Li doping using radio frequency reactive magnetron sputtering

Chen, Liang-xian, Liu, Sheng, Li, Cheng-ming, Wang, Yichao, Liu, Jin-long and Wei, Jun-jun 2015, Enhanced deposition of ZnO films by Li doping using radio frequency reactive magnetron sputtering, International journal of minerals, metallurgy and materials, vol. 22, no. 10, pp. 1108-1114, doi: 10.1007/s12613-015-1174-z.

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Title Enhanced deposition of ZnO films by Li doping using radio frequency reactive magnetron sputtering
Author(s) Chen, Liang-xian
Liu, Sheng
Li, Cheng-ming
Wang, Yichao
Liu, Jin-long
Wei, Jun-jun
Journal name International journal of minerals, metallurgy and materials
Volume number 22
Issue number 10
Start page 1108
End page 1114
Total pages 7
Publisher Springer
Place of publication Berlin, Germany
Publication date 2015-10
ISSN 1674-4799
1869-103X
Keyword(s) zinc oxide
thin films
doping
deposition
magnetron sputtering
Language eng
DOI 10.1007/s12613-015-1174-z
Field of Research 030604 Electrochemistry
030302 Nanochemistry and Supramolecular Chemistry
09 Engineering
HERDC Research category C1.1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2015, University of Science and Technology Beijing and Springer Verlag
Persistent URL http://hdl.handle.net/10536/DRO/DU:30103381

Document type: Journal Article
Collection: School of Life and Environmental Sciences
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