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Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering

Chen, Liang-Xian, Liu, Hao, Liu, Sheng, Li, Cheng-Ming, Wang, Yichao, An, Kang, Hua, Chen-Yi, Liu, Jin-Long, Wei, Jun-Jun, Hei, Li-Fu and Lv, Fan-Xiu 2017, Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering, Applied surface science, pp. 1-8, doi: 10.1016/j.apsusc.2017.09.036.

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Title Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering
Author(s) Chen, Liang-Xian
Liu, Hao
Liu, Sheng
Li, Cheng-Ming
Wang, Yichao
An, Kang
Hua, Chen-Yi
Liu, Jin-Long
Wei, Jun-Jun
Hei, Li-Fu
Lv, Fan-Xiu
Journal name Applied surface science
Start page 1
End page 8
Total pages 8
Publisher Elsevier B.V.
Place of publication Amsterdam, The Netherlands
Publication date 2017-09-06
ISSN 0169-4332
Keyword(s) AlN films
buffer layer
bulk resistivity
rocking curve
hardness and Young’s modulus
Notes In press
Language eng
DOI 10.1016/j.apsusc.2017.09.036
Field of Research 030603 Colloid and Surface Chemistry
040607 Surface Processes
MD Multidisciplinary
HERDC Research category C1.1 Refereed article in a scholarly journal
ERA Research output type C Journal article
Copyright notice ©2017, Elsevier B.V.
Free to Read? Yes
Persistent URL http://hdl.handle.net/10536/DRO/DU:30103951

Document type: Journal Article
Collections: School of Life and Environmental Sciences
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Every reasonable effort has been made to ensure that permission has been obtained for items included in DRO. If you believe that your rights have been infringed by this repository, please contact drosupport@deakin.edu.au.