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Evaluation of pulsed laser deposited thin films properties on the basis of the nanoindentation test

Perzyński, Konrad, Cios, Grzegorz, Szwachta, Grzegorz, Zych, Dawid, Setty, Mohan, Bala, Piotr and Madej, Łukasz 2017, Evaluation of pulsed laser deposited thin films properties on the basis of the nanoindentation test, in ICTP 2017 : Proceedings of the 12th International Conference on Technology of Plasticity, Elsevier, Amsterdam, The Netherlands, pp. 2191-2196, doi: 10.1016/j.proeng.2017.10.980.

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Title Evaluation of pulsed laser deposited thin films properties on the basis of the nanoindentation test
Author(s) Perzyński, Konrad
Cios, Grzegorz
Szwachta, Grzegorz
Zych, Dawid
Setty, MohanORCID iD for Setty, Mohan orcid.org/0000-0003-1871-0249
Bala, Piotr
Madej, Łukasz
Conference name Department of Engineering at the University of Cambridge. Conference (12th : 2017 : Cambridge, Eng.)
Conference location Cambridge, Eng.
Conference dates 2017/09/17 - 2017/09/22
Title of proceedings ICTP 2017 : Proceedings of the 12th International Conference on Technology of Plasticity
Editor(s) Allwood, Julian
Publication date 2017
Series Department of Engineering at the University of Cambridge Conference
Start page 2191
End page 2196
Total pages 6
Publisher Elsevier
Place of publication Amsterdam, The Netherlands
Keyword(s) pulsar laser deposition
titanium nitride
nanoindentation
FE
inverse analysis
Summary The overall goal of the research, is development of the numerical model capable of replicating local heterogenous material behavior of thin film materials under loading conditions. This particular work is focused on determination of flow stress characteristics of investigated TiN thin film based on the nanoindentation test. To properly recalculate measured load-displacement values into the required stress-strain curve an inverse analysis techniques are used. Subsequent stages including deposition process of TiN layer, room temperature nanoindentation tests and development of direct problem numerical model for the inverse analysis are described. Capabilities of the approach are also discussed within the work.
ISSN 1877-7058
Language eng
DOI 10.1016/j.proeng.2017.10.980
Field of Research 091207 Metals and Alloy Materials
MD Multidisciplinary
HERDC Research category E1 Full written paper - refereed
Copyright notice ©2017, The Authors
Free to Read? Yes
Use Rights Creative Commons Attribution Non-Commercial No-Derivatives licence
Persistent URL http://hdl.handle.net/10536/DRO/DU:30104225

Document type: Conference Paper
Collections: Institute for Frontier Materials
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Every reasonable effort has been made to ensure that permission has been obtained for items included in DRO. If you believe that your rights have been infringed by this repository, please contact drosupport@deakin.edu.au.