A MEMS capacitive pH sensor for high acidic and basic solutions

Arefin, Md Shamsul, Coskun, M Bulut, Alan, Tuncay, Neild, Adrian, Redoute, Jean-Michel and Yuce, Mehmet R 2014, A MEMS capacitive pH sensor for high acidic and basic solutions, in IEEE SENSORS 2014 : Proceedings of the 13th IEEE SENSORS Conference, Institute of Electrical and Electronics Engineers, Piscataway, N.J., pp. 1792-1794, doi: 10.1109/ICSENS.2014.6985373.

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Title A MEMS capacitive pH sensor for high acidic and basic solutions
Author(s) Arefin, Md ShamsulORCID iD for Arefin, Md Shamsul orcid.org/0000-0001-6441-1720
Coskun, M Bulut
Alan, Tuncay
Neild, Adrian
Redoute, Jean-Michel
Yuce, Mehmet R
Conference name IEEE Sensors Council. Conference (13th : 2014 : Valencia, Spain)
Conference location Valencia, Spain
Conference dates 2014/11/02 - 2014/11/05
Title of proceedings IEEE SENSORS 2014 : Proceedings of the 13th IEEE SENSORS Conference
Editor(s) [Unknown]
Publication date 2014
Series IEEE Sensors Council Conference
Start page 1792
End page 1794
Total pages 3
Publisher Institute of Electrical and Electronics Engineers
Place of publication Piscataway, N.J.
Keyword(s) pH sensor
MEMS
capacitive
fringing field
ISBN 978-1-4799-0162-3
ISSN 1930-0395
2168-9229
Language eng
DOI 10.1109/ICSENS.2014.6985373
HERDC Research category E1.1 Full written paper - refereed
Copyright notice ©2014, IEEE
Persistent URL http://hdl.handle.net/10536/DRO/DU:30122347

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