Zone melting recrystallization of polysilicon by a focused-lamp with unsymmetric trapezoidal power distribution

Choi, Jinho, Song, Ho-Jun and Kim, Choong-Ki 1991, Zone melting recrystallization of polysilicon by a focused-lamp with unsymmetric trapezoidal power distribution, Journal of electronic materials, vol. 20, no. 3, pp. 231-235, doi: 10.1007/BF02651898.

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Title Zone melting recrystallization of polysilicon by a focused-lamp with unsymmetric trapezoidal power distribution
Author(s) Choi, JinhoORCID iD for Choi, Jinho orcid.org/0000-0002-4895-6680
Song, Ho-Jun
Kim, Choong-Ki
Journal name Journal of electronic materials
Volume number 20
Issue number 3
Start page 231
End page 235
Total pages 5
Publisher Springer
Place of publication Berlin, Germany
Publication date 1991-03
ISSN 0361-5235
1543-186X
Keyword(s) SOI
ZMR
Trapezoidal power distribution
Language eng
DOI 10.1007/BF02651898
Indigenous content off
Field of Research 0906 Electrical and Electronic Engineering
HERDC Research category C1.1 Refereed article in a scholarly journal
Copyright notice ©1991, The Mineral, Metal & Materials Society, Inc.
Persistent URL http://hdl.handle.net/10536/DRO/DU:30126509

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