Chemical Vapor Deposition for Film Deposition
Version 2 2024-06-03, 10:37
Version 1 2023-10-23, 02:36
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posted on 2024-06-03, 10:37 authored by Dharmalingam Sugumar, Lingxue KongLingxue KongChemical Vapor Deposition for Film Deposition
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422-429Publisher DOI
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D2.1 Reference workPublisher
Springer New YorkTitle of book
Encyclopedia of Microfluidics and NanofluidicsUsage metrics
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