3-D modeling of a carbon nanotube cantilever biosensor

In this paper, 3-D finite element modeling and simulations are carried out to investigate the bending deformation of a single-walled carbon nanotube cantilever biosensor due to mass attached, and addition of a nano-scale particles to the beam tip resulting from the bioparticle detection. In addition, an algorithm for an electrostaticmechanical coupled system is developed. The computed results are in excellent agreement with the well known electrostatic equations that govern the deformation.