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CO2 laser machining of fully packaged autonomous microfluidic systems

Version 2 2024-06-18, 06:28
Version 1 2023-02-05, 23:22
conference contribution
posted on 2024-06-18, 06:28 authored by MI Mohammed, MPY Desmulliez
CO2 laser machining of fully packaged autonomous microfluidic systems

History

Location

FRANCE, Cannes

Language

English

Publication classification

E1.1 Full written paper - refereed

Pagination

63-70

Start date

2012-04-25

End date

2012-04-27

Title of proceedings

2012 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP)

Event

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

Publisher

IEEE COMPUTER SOC

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