CO2 laser machining of fully packaged autonomous microfluidic systems
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conference contribution
posted on 2024-06-18, 06:28 authored by MI Mohammed, MPY DesmulliezCO2 laser machining of fully packaged autonomous microfluidic systems
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Location
FRANCE, CannesLanguage
EnglishPublication classification
E1.1 Full written paper - refereedPagination
63-70Start date
2012-04-25End date
2012-04-27Title of proceedings
2012 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP)Event
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)Publisher
IEEE COMPUTER SOCPublication URL
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