Deakin University

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Concept design of a novel tactile probe tip for down scaled 3D CMMs

conference contribution
posted on 2005-01-01, 00:00 authored by H Ji, Lingxue KongLingxue Kong, H Hsu, A Wedding, G Lin, K Fan
Although coordinate metrology has reached a very high state of development concerning versatility and accuracy for common engineering parts, a high precision capability with nano scale resolution and accuracy is often hard to achieve when it is required to measure very small parts and features. The limiting component is the bulky probing system of traditional CMMs (coordinate measuring machines). In order to satisfy increasing demand for highly accurate geometrical measurements on small parts and small structures, a new measuring probe of high sensitivity and small geometrical dimension with low contact forces needs to be developed. In this paper, a novel probing system, which combines a FBG (Fibre Bragg Grating) embedded optical fibre tactile probe with an optical sensing technique, has been proposed. With the sensor elements integrated into the probe tip directly, the system sensitivity can be increased significantly. A preliminary theoretical analysis of the sensitivity of the FBG fibre sensor under axial and lateral end point loading has been presented and the results show that this micro scale probe has great potential to realize a resolution of 1nanometer on geometrical measurement of small parts.



Society of Photo-optical Instrumentation Engineers (2005 : Brisbane, Queensland)




Brisbane, Queensland

Place of publication

[Brisbane, Qld.]

Start date


End date




Publication classification

E1.1 Full written paper - refereed


J Chiao, A Dzurak, C Jagadish, D Thiel

Title of proceedings

SPIE 2005 : Proceedings of the 2005 Society of Photo-optical Instrumentation Engineers, International symposium on Microelectronics, MEMS and Nanotechnology