Evaluation of reliability of transparent SiOCH by electrochemical methods
conference contribution
posted on 2007-01-01, 00:00 authored by N Nam, J Kim, D Kim, N LeeEvaluation of reliability of transparent SiOCH by electrochemical methods
History
Event
International Symposium on Dry Process. (29th : 2007 : Tokyo, Japan)Pagination
1 - 1Publisher
DPSLocation
Tokyo, JapanPlace of publication
Tokyo, JapanStart date
2007-11-13End date
2007-11-14Language
engPublication classification
EN.1 Other conference paperTitle of proceedings
DPS 2007 : Proceedings of 29th international Symposium on Dry ProcessUsage metrics
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