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Atomic layer deposition of transition metal films and nanostructures for electronic and catalytic applications

Version 2 2024-06-05, 02:15
Version 1 2020-10-05, 08:22
journal contribution
posted on 2021-01-01, 00:00 authored by James MainaJames Maina, Andrea Merenda, M Weber, Jenny PringleJenny Pringle, M Bechelany, L Hyde, Ludovic Dumee
Atomic layer deposition of transition metal films and nanostructures for electronic and catalytic applications

History

Journal

Critical Reviews in Solid State and Materials Sciences

Volume

46

Issue

5

Pagination

468 - 489

Publisher

TAYLOR & FRANCIS INC

ISSN

1040-8436

eISSN

1547-6561

Language

English

Publication classification

C Journal article; CN Other journal article