Calibration and uncertainty estimation of one-dimensional reference grating using a metrological atomic force microscope
Version 2 2024-06-19, 04:44
Version 1 2023-02-01, 02:46
journal contribution
posted on 2024-06-19, 04:44 authored by Q Huang, D Yuan, H YouCalibration and uncertainty estimation of one-dimensional reference grating using a metrological atomic force microscope
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Zhongguo Jixie Gongcheng/China Mechanical EngineeringVolume
23Pagination
531-536Publisher DOI
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1004-132XPublication classification
CN.1 Other journal articleIssue
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