Characteristics of Nanocomposite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
Version 2 2024-06-03, 16:41
Version 1 2017-05-11, 15:01
journal contribution
posted on 2024-06-03, 16:41 authored by SJ Yun, JW Lim, H-T KimCharacteristics of Nanocomposite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
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Journal
Journal of Nanoscience and NanotechnologyVolume
7Pagination
4180-4184Publisher DOI
ISSN
1533-4880Language
engPublication classification
CN.1 Other journal articleIssue
11Publisher
American Scientific PublishersUsage metrics
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