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Characteristics of Nanocomposite ZrO₂/Al₂O₃ Films Deposited by Plasma-Enhanced Atomic Layer Deposition

journal contribution

posted on 2007-11-01, 00:00 authored by S J Yun, J W Lim, H-T Kim

Characteristics of Nanocomposite ZrO₂/Al₂O₃ Films Deposited by Plasma-Enhanced Atomic Layer Deposition

History

Journal

Journal of Nanoscience and Nanotechnology

Volume

7

Issue

11

Pagination

4180 - 4184

Publisher

American Scientific Publishers

Publisher DOI

https://doi.org/10.1166/jnn.2007.116

ISSN

1533-4880

Language

eng

Publication classification

CN.1 Other journal article

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Characteristics of Nanocomposite ZrO₂/Al₂O₃ Films Deposited by Plasma-Enhanced Atomic Layer Deposition

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