Characterization of ion track morphology formed by swift heavy ion irradiation in silicon oxynitride films

Mota-Santiago, P; Schauries, D; Nadzri, A; Vora, K; Ridgway, MC; Kluth, P

Characterization of ion track morphology formed by swift heavy ion irradiation in silicon oxynitride films

https://hdl.handle.net/10536/DRO/DU:30123051
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posted on 2024-06-13, 12:35 authored by P Mota-Santiago, D Schauries, A Nadzri, K Vora, MC Ridgway, P Kluth

Characterization of ion track morphology formed by swift heavy ion irradiation in silicon oxynitride films

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DOI - Is version of https://doi.org/10.1051/epjconf/20159100008

Location

Canberra, AUSTRALIA

Open access

Yes

Link to full text

https://www.epj-conferences.org/articles/epjconf/pdf/2015/10/epjconf_hias2014_00008.pdf

Language

English

Publication classification

C1.1 Refereed article in a scholarly journal

Editor/Contributor(s)

Simenel C, Frohlich M, Lee BQ, Schauries D

Journal

EPJ Web of Conferences

Volume

91

Article number

ARTN 00008

ISSN

2101-6275

eISSN

2100-014X

Publisher

E D P SCIENCES

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Keywords

Science & Technology Physical Sciences Physics, Multidisciplinary Physics

Characterization of ion track morphology formed by swift heavy ion irradiation in silicon oxynitride films

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Related Materials

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Open access

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