Control of bombardment energy and energetic species toward a superdense titanium nitride film

Xie, Zhigang; Allen, Adolph Miller; Chang, Mei; Wang, Phillip; Gung, Tza-jing

Control of bombardment energy and energetic species toward a superdense titanium nitride film

journal contribution

posted on 2023-06-21, 06:34 authored by Zhigang Xie, Adolph Miller Allen, Mei Chang, Phillip Wang, Tza-jing Gung

Control of bombardment energy and energetic species toward a superdense titanium nitride film

History

Journal

Journal of Vacuum Science & Technology A

Volume

28

Pagination

1326-1329

Location

Melville, N.Y.

Publisher DOI

https://doi.org/10.1116/1.3490018

ISSN

0734-2101

eISSN

1520-8559

Language

English

Publication classification

C1.1 Refereed article in a scholarly journal

Issue

6

Publisher

AIP Publishing

Publication URL

http://dx.doi.org/10.1116/1.3490018

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Keywords

ASSISTED DEPOSITION BIAS GROWTH LAYERS Materials Science Materials Science, Coatings & Films MICROSTRUCTURE Physical Sciences Physics Physics, Applied Science & Technology SHEATH THICKNESS Technology TECHNOLOGY TEXTURE

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Control of bombardment energy and energetic species toward a superdense titanium nitride film

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eISSN

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