Data handling techniques in online semiconductor technology CAD laboratory

Modern semiconductor manufacturing is recognized as a specialized field in electrical engineering curricula. Teaching micro- and nanoelectronics in university environment is a challenging task and a new framework is needed. An integrated measurement-based microelectronics laboratory along with technology computer aided design (TCAD) simulation laboratory has been developed and is in use for imparting hands-on laboratory experience to the students. An internet-based laboratory management system for monitoring and control of a real-time measurement system interfaced via a dedicated local computer is discussed. TCAD process/device simulations generate a vast amount of data and handling of the data is a challenge for web-based applications. A simple architecture for implementation, visualization and analyses of the generated data from process/device simulations is reported.